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  1. Free, publicly-accessible full text available September 1, 2024
  2. We report the realization of efficiently coupled 3D tapered waveguide-to-fiber couplers (TWCs) based on standard lithography techniques. The 3D TWC design is capable of achieving highly efficient flat-cleaved fiber to silicon nitride photonic waveguide coupling, withT ≈ 95 % polarization-insensitive coupling efficiency, wide bandwidth, and good misalignment tolerance. Our fabricated 3D TWCs on a functional nanophotonic circuit achieveT ≈ 85% coupling efficiency. Beyond applications in high-efficiency photon coupling, the demonstrated 3D lithography technique provides a complementary approach for mode field shaping and effective refractive index engineering, potentially useful for general applications in integrated photonic circuits.

     
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